Control of an XY Nano-Positioning Table for a Compact Nano-Machine Tool
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: JSME International Journal Series C
سال: 2006
ISSN: 1344-7653,1347-538X
DOI: 10.1299/jsmec.49.21